ASML and TSMC Announce Initiative to Pioneer Industry Transition to Large-Format Photomasks for High NA EUV
ASML and TSMC announced a joint initiative to move the industry to large-format photomasks for High NA EUV lithography. The two companies will coordinate the mask-infrastructure transition that High NA adoption at leading-edge nodes depends on.
文章預覽
Accessibility: Skip TopNav ASML and TSMC Announce Initiative to Pioneer Industry Transition to Large-Format Photomasks for High NA EUV September 08, 2026 02:04 ET | Source: ASML Netherlands BV ASML Netherlands BV ASML and TSMC Announce Initiative to Pioneer Industry Transition to Large-Format Photomasks for High NA EUV On September 7, in advance of the SPIE Bacus Conference, ASML and TSMC formed a collaborative industry initiative to drive the transition to 12-inch photomasks, maximizing the value of High NA EUV lithography. The initiative targets establishing a 12-inch mask pilot line by 2031…